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Shibaura Mechatronics batch-type magnetron sputtering device
Batch Type Magnetron Sputtering Device, supplied by Shibaura Mechatronics, used in various techniques. Bioz Stars score: 90/100, based on 1 PubMed citations. ZERO BIAS - scores, article reviews, protocol conditions and more
https://www.bioz.com/product/batch-type+magnetron+sputtering+device/magnetron+sputtering+machine+shibaura+mechatronics/us07815983-329-12-17
Average 90 stars, based on 1 article reviews
batch-type magnetron sputtering device - by Bioz Stars, 2026-09
90/100 stars

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Article Title: Gas-barrier film, substrate film, and organic electroluminescent device
Article Snippet: Fabrication of Gas-Barrier Film of the Invention (Sample No. 15): A commercially-available, batch-type magnetron sputtering device (by Shibaura Mechatronics) was used.



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Shibaura Mechatronics batch-type magnetron sputtering device
Batch Type Magnetron Sputtering Device, supplied by Shibaura Mechatronics, used in various techniques. Bioz Stars score: 90/100, based on 1 PubMed citations. ZERO BIAS - scores, article reviews, protocol conditions and more
https://www.bioz.com/product/batch-type+magnetron+sputtering+device/magnetron+sputtering+machine+shibaura+mechatronics/us07815983-329-12-17
Average 90 stars, based on 1 article reviews
batch-type magnetron sputtering device - by Bioz Stars, 2026-09
90/100 stars
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